M-Solv scientific staff have a vast experience and expertise in laser micromachining. Here are some of the relevant technical papers to which they have contributed.

Characterization of the effects of different lasers on the tensile strength of fibers during laser writing of fiber Bragg gratings

Development of an industrial femtosecond laser micromachining system

Developments in laser micro-machining techniques

Fabrication of axisymmetric ceramic microparts using pulsed laser ablation

Femtosecond laser micromachining: Current status and applications

Industrial applications of pulsed lasers to materials microprocessing

Laser micromachining for manufacturing MEMS devices

Laser micromachining in 3D and large area applications.

Laser micromachining of high-density optical structures on large substrates

Laser micromachining of optical materials with a 157-nm fluorine laser

Laser micromachining techniques for industrial MEMS applications

Laser micromachining: new developments and applications

Laser micromachining: new techniques and developments for display applications (Proceedings Paper)

Microhole drilling using reshaped pulsed Gaussian laser beams

New developments and applications in the production of 3D microstructures by laser micromachining

New techniques for laser micromachining MEMS devices

Pulsed laser ablation for volume micro-optical arrays on large area substrates

Pulsed laser ablation of polymers for display applications

Pulsed laser processing of shallow micro-optical structures

Recent applications of pulsed lasers in advanced materials processing

UV laser micromachining of silicon, indium phosphide and lithium niobate for telecommunications applications

Carton sterilization by u.v.-C excimer laser light: recovery of Bacillus subtilis spores on vegetable extracts and food simulation matrices

Diamond photodetector response to deep UV excimer laser excitation

Direct manufacture of miniature bio-particle electro-manipulator devices using excimer laser mask projection techniques

Excimer laser microfabrication and micromachining

Excimer laser micromachining of polymers using half-tone masks: mask design and process optimization.

Excimer laser micromachining system for the production of bioparticle electromanipulation devices

Excimer laser micromachining: a 15-year perspective

Excimer laser patterning of thick and thin films for high density packaging

Excimer laser projector for microelectronics applications

Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection

High resolution micromachining using short wavelength and shortpulse lasers

High-resolution 157-nm imaging for lithography and micromachining applications

High-resolution 157-nm laser micromachining of polymers

High-resolution microlithography using a 193-nm excimer laser source

Inactivation of Bacillus subtilis spores on aluminum and polyethylene preformed cartons by UV-excimer laser irradiation

Inactivation of Bacillus subtilis spores on packaging surfaces by u.v. excimer laser irradiation

Laser-assisted manufacture for performance-optimized dielectrically loaded GPS antennas for mobile telephones

Laser microprojection for micromechanical device fabrication

Manufacture of a conformal multilayer rf antenna substrate using excimer mask imaging technology and a 6-axis robot

Manufacture of miniature bioparticle electromanipulators by excimer laser ablation

Microstructuring by excimer laser

Modelling of solid-state and excimer laser processes for 3D micromachining.

Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks

Novel applications of excimer lasers for fabricating biomedical and sensor products

Practical study of the effects of exposure conditions on the quality of fiber Bragg gratings written with excimer and argon-ion lasers

Production of novel 3D microstructures using excimer laser mask projection techniques

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