High-resolution 157-nm laser micromachining of polymers High-resolution 157-nm laser micromachining of polymers
Abstract
An Exitech Microstepper exposure tool has been used to laser micromachine a variety of polymeric materials with high resolution at a wavelength of 157 nm. We have demonstrated it is possible to machine thin film materials, different photoresists and fluorine-based polymers with submicron accuracy and resolution. The tool used for this work incorporated a 36x 0.5 NA Schwarzschild lens to project submicron resolution images of binary chrome-on-CaF2 masks onto free-standing and spun-on polymer films. The beam delivery system and the illuminator includes beam shaping and homogenization optics that allow fluences of greater than 1J/cm2 to be produced at the workpiece. Details of the optical system are presented together with process parameters and the results of the materials which have been machined.
- Articles
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- A study of angular dependence in the ablation rate of polymers by nanosecond pulses
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- Applications of laser ablation to microengineering
- CAD/CAM software for an industrial laser manufacturing tool
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- Laser micromachining in 3D and large area applications.
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- Carton sterilization by u.v.-C excimer laser light: recovery of Bacillus subtilis spores on vegetable extracts and food simulation matrices
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- Direct manufacture of miniature bio-particle electro-manipulator devices using excimer laser mask projection techniques
- Excimer laser microfabrication and micromachining
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- Excimer laser micromachining system for the production of bioparticle electromanipulation devices
- Excimer laser micromachining: a 15-year perspective
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- Inactivation of Bacillus subtilis spores on packaging surfaces by u.v. excimer laser irradiation
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- Laser microprojection for micromechanical device fabrication
- Manufacture of a conformal multilayer rf antenna substrate using excimer mask imaging technology and a 6-axis robot
- Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
- Microstructuring by excimer laser
- Modelling of solid-state and excimer laser processes for 3D micromachining.
- Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks
- Novel applications of excimer lasers for fabricating biomedical and sensor products
- Practical study of the effects of exposure conditions on the quality of fiber Bragg gratings written with excimer and argon-ion lasers
- Production of novel 3D microstructures using excimer laser mask projection techniques
