High-resolution microlithography using a 193-nm excimer laser source High-resolution microlithography using a 193-nm excimer laser source
Abstract
A 193 nm excimer laser microstepper has been developed for deep UV photolithography research and development and system details are presented. The tool incorporates a times 10, 0.5 NA, 4 mm field diameter, high-resolution imaging lens of either all-refractive or catadioptric design. An all-fused silica refractive lens has been used in the results reported here to carry out exposures in polymethylmethacrylate (PMMA) and polyvinylphonel (MX-P8) photoresists. Well-resolved images of 0.2 micrometer dense lines and spaces have been produced in the PMMA and MX-P8 resists.
- Articles
- A completely laser-based production method for fibre Bragg grating devices
- A study of angular dependence in the ablation rate of polymers by nanosecond pulses
- Advanced laser micromachining processes for MEMS and optical applications
- Advanced laser tools for display device production on super large substrates
- Applications of laser ablation to microengineering
- CAD/CAM software for an industrial laser manufacturing tool
- Characterization of the effects of different lasers on the tensile strength of fibers during laser writing of fiber Bragg gratings
- Development of an industrial femtosecond laser micromachining system
- Developments in laser micro-machining techniques
- Fabrication of axisymmetric ceramic microparts using pulsed laser ablation
- Femtosecond laser micromachining: Current status and applications
- Industrial applications of pulsed lasers to materials microprocessing
- Laser micromachining for manufacturing MEMS devices
- Laser micromachining in 3D and large area applications.
- Laser micromachining of high-density optical structures on large substrates
- Laser micromachining of optical materials with a 157-nm fluorine laser
- Laser micromachining techniques for industrial MEMS applications
- Laser micromachining: new developments and applications
- Laser micromachining: new techniques and developments for display applications (Proceedings Paper)
- Microhole drilling using reshaped pulsed Gaussian laser beams
- New developments and applications in the production of 3D microstructures by laser micromachining
- New techniques for laser micromachining MEMS devices
- Pulsed laser ablation for volume micro-optical arrays on large area substrates
- Pulsed laser ablation of polymers for display applications
- Pulsed laser processing of shallow micro-optical structures
- Recent applications of pulsed lasers in advanced materials processing
- UV laser micromachining of silicon, indium phosphide and lithium niobate for telecommunications applications
- Carton sterilization by u.v.-C excimer laser light: recovery of Bacillus subtilis spores on vegetable extracts and food simulation matrices
- Diamond photodetector response to deep UV excimer laser excitation
- Direct manufacture of miniature bio-particle electro-manipulator devices using excimer laser mask projection techniques
- Excimer laser microfabrication and micromachining
- Excimer laser micromachining of polymers using half-tone masks: mask design and process optimization.
- Excimer laser micromachining system for the production of bioparticle electromanipulation devices
- Excimer laser micromachining: a 15-year perspective
- Excimer laser patterning of thick and thin films for high density packaging
- Excimer laser projector for microelectronics applications
- Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection
- High resolution micromachining using short wavelength and shortpulse lasers
- High-resolution 157-nm imaging for lithography and micromachining applications
- High-resolution 157-nm laser micromachining of polymers
- High-resolution microlithography using a 193-nm excimer laser source
- Inactivation of Bacillus subtilis spores on aluminum and polyethylene preformed cartons by UV-excimer laser irradiation
- Inactivation of Bacillus subtilis spores on packaging surfaces by u.v. excimer laser irradiation
- Laser-assisted manufacture for performance-optimized dielectrically loaded GPS antennas for mobile telephones
- Laser microprojection for micromechanical device fabrication
- Manufacture of a conformal multilayer rf antenna substrate using excimer mask imaging technology and a 6-axis robot
- Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
- Microstructuring by excimer laser
- Modelling of solid-state and excimer laser processes for 3D micromachining.
- Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks
- Novel applications of excimer lasers for fabricating biomedical and sensor products
- Practical study of the effects of exposure conditions on the quality of fiber Bragg gratings written with excimer and argon-ion lasers
- Production of novel 3D microstructures using excimer laser mask projection techniques
