UV laser micromachining of silicon, indium phosphide and lithium niobate for telecommunications applications UV laser micromachining of silicon, indium phosphide and lithium niobate for telecommunications applications
Abstract
The laser micromachining characteristics of indium phosphide, lithium niobate and silicon have been characterised using a 355nm neodymium vanadate laser and 193nm and 248nm excimer lasers. Etch rates for these materials are presented at the different laser wavelengths. High quality cutting of the three materials is demonstrated with the 355nm laser and an excimer laser mask projection method is subsequently used to micromachine precision V-grooves as fibre placement structures. Silicon microbenches, used for the integration of multiple-function devices, are also produced using the 355nm laser.
- Articles
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- A study of angular dependence in the ablation rate of polymers by nanosecond pulses
- Advanced laser micromachining processes for MEMS and optical applications
- Advanced laser tools for display device production on super large substrates
- Applications of laser ablation to microengineering
- CAD/CAM software for an industrial laser manufacturing tool
- Characterization of the effects of different lasers on the tensile strength of fibers during laser writing of fiber Bragg gratings
- Development of an industrial femtosecond laser micromachining system
- Developments in laser micro-machining techniques
- Fabrication of axisymmetric ceramic microparts using pulsed laser ablation
- Femtosecond laser micromachining: Current status and applications
- Industrial applications of pulsed lasers to materials microprocessing
- Laser micromachining for manufacturing MEMS devices
- Laser micromachining in 3D and large area applications.
- Laser micromachining of high-density optical structures on large substrates
- Laser micromachining of optical materials with a 157-nm fluorine laser
- Laser micromachining techniques for industrial MEMS applications
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- New developments and applications in the production of 3D microstructures by laser micromachining
- New techniques for laser micromachining MEMS devices
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- Pulsed laser ablation of polymers for display applications
- Pulsed laser processing of shallow micro-optical structures
- Recent applications of pulsed lasers in advanced materials processing
- UV laser micromachining of silicon, indium phosphide and lithium niobate for telecommunications applications
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- Diamond photodetector response to deep UV excimer laser excitation
- Direct manufacture of miniature bio-particle electro-manipulator devices using excimer laser mask projection techniques
- Excimer laser microfabrication and micromachining
- Excimer laser micromachining of polymers using half-tone masks: mask design and process optimization.
- Excimer laser micromachining system for the production of bioparticle electromanipulation devices
- Excimer laser micromachining: a 15-year perspective
- Excimer laser patterning of thick and thin films for high density packaging
- Excimer laser projector for microelectronics applications
- Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection
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- High-resolution 157-nm imaging for lithography and micromachining applications
- High-resolution 157-nm laser micromachining of polymers
- High-resolution microlithography using a 193-nm excimer laser source
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- Inactivation of Bacillus subtilis spores on packaging surfaces by u.v. excimer laser irradiation
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- Laser microprojection for micromechanical device fabrication
- Manufacture of a conformal multilayer rf antenna substrate using excimer mask imaging technology and a 6-axis robot
- Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
- Microstructuring by excimer laser
- Modelling of solid-state and excimer laser processes for 3D micromachining.
- Multilevel diffractive optical element manufacture by excimer laser ablation and halftone masks
- Novel applications of excimer lasers for fabricating biomedical and sensor products
- Practical study of the effects of exposure conditions on the quality of fiber Bragg gratings written with excimer and argon-ion lasers
- Production of novel 3D microstructures using excimer laser mask projection techniques
