Stages
Stages: *X-Y Axis (CNC)
- Drive: Precision linear rails + belt drive + encoder + servo motor
- Travel: 1020 x 610mm
- Speed: 1000mm/s
- Repeatability: ±10µm
- Accuracy: ±100µm
- Resolution: 10µm
Stages: *Z Axis (CNC) Focus control
- Drive: Precision linear rails + ball screw + braked stepper
- Travel: 240mm
- Speed: 700mm/s
- Repeatability: ±10µm
- Accuracy: ±100µm
- Resolution: ±5µm
* Standard specification. Alternative specifications and additional axis available to suit customer requirements upon request.
Machine Architecture
- Metal extrusion frame with air and moisture tight enclosure
- Recirculating glove box with <1ppm moisture and oxygen levels
- Standalone glove box or multiple with linking antechamber
- Single or double fronted
- Light curtain interlocked glove ports
- Multiple sizes available upon request
- Dimensions: 2.5m(H) x 2.5m(W) x 1.3mm(D)
- Weight: 1000kg
Glovebox provided by MBraun